摘要 |
A contact unit which has a simple configuration and can perform precise alignment with a test object is provided. On the top surface of a holder base (15) provided to a contact unit (2), contact probes (13) are arranged correspondingly to the arrangement pattern of test pads (11) provided in a circuit-forming region (5a), which is a test object, and groups of detecting probes (14a to 14d) are arranged correspondingly to dummy pads (7a to 7d). Each group of detecting probes (14) consists of probes (19, 20) connected respectively to a light-emitting diode (12) and a voltage source (21) which constitute a positional relationship detector (22). Since the light-emitting diode (12) emits light when the probes (19, 20) comes in contact with the corresponding dummy pad (7) to become conductive with each other in a test using the contact unit (2), whether or not the alignment has been performed precisely can be judged by checking the emission state of the light-emitting diode (12).
|