| 发明名称 |
Humidifying apparatus, lithographic apparatus and humidifying method |
| 摘要 |
A humidifying apparatus is disclosed in which gas is provided to a first side of a membrane and liquid to a second side of the same membrane. The membrane is non-porous to the liquid but porous to vapour of the liquid and is liquidphilic to said liquid.
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| 申请公布号 |
US2008179765(A1) |
申请公布日期 |
2008.07.31 |
| 申请号 |
US20070710428 |
申请日期 |
2007.02.26 |
| 申请人 |
ASML NETHERLAND B.V. |
发明人 |
VAN DER NET ANTONIUS JOHANNUS |
| 分类号 |
C10J1/10;B01D47/00 |
主分类号 |
C10J1/10 |
| 代理机构 |
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