| 摘要 |
PROBLEM TO BE SOLVED: To provide a high quality metal fiber textile obtained by smoothing the surface of each stainless mesh composed of a fine textile such as a screen printing board for a printed wiring and a large area filter used for electronic device parts, and in which the rigidity and tensile strength of the textile are improved, and to provide an article coated with a high quality DLC (Diamond Like Carbon) film with a gradient structure by carbon ion implantation which is obtained by introducing a hydrocarbon based gas comprising carbon of at least one or more atoms in a reduced pressure, so as to generate plasma, and by applying a negative high frequency pulse voltage thereto. SOLUTION: Disclosed is a metal fiber textile member obtained by introducing a hydrocarbon based gas comprising carbon of at least one or more atoms in a state where many screen meshes are set, and feeding high frequency electric power, so as to generate plasma, applying high frequency voltage to the object to be treated therein, implanting carbon ions into a base material, and thereafter forming a DLC film. Also disclosed is a surface treatment method therefor. COPYRIGHT: (C)2008,JPO&INPIT
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