,申请号JP20070552690-传众专利搜索

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发明名称
摘要
申请公布号	JP2008529293(A)	申请公布日期	2008.07.31
申请号	JP20070552690	申请日期	2006.01.24
申请人		发明人
分类号	H01L21/027;H01J1/304;H01J1/32;H01J19/24;H01J31/12	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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