| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device having a light-receiving means capable of inspecting all flatly arranged devices that should be inspected under exposure to light, an inspection method for the semiconductor device, and a semiconductor device inspection apparatus. SOLUTION: The semiconductor device 110 carries on its surface the light-receiving means 111a, an inspection data processing means 111c which is connected electrically to the light-receiving means 111a and inspects the operation of the light-receiving means 111a, and a plurality of inspection electrode pads 113 which is connected electrically to the inspection data processing means 111c. Each of the inspection electrode pads 113 is disposed on the outer edge of a pair of opposite sides of the semiconductor device 110. COPYRIGHT: (C)2008,JPO&INPIT |
