APPARATUS FOR REMOVING EXHAUST PIPE ON VACUUM EXHAUST AND DISCHARGE GAS INJECTION APPRATUS

摘要

An apparatus for removing an exhaust pipe from a vacuum exhaust/discharge gas injection apparatus is provided to remove the exhaust pipe from a multi-stage and multi-column injection apparatus without recognizing a position of the exhaust pipe. Plural vertical frames(12) are formed on a main frame. A first plate(21) has one side surface, which is arranged to face one side surface of the vertical frame. The first plate is moved back and forth with respect to the vertical frame. A second plate(22) has one side surface, which is arranged to face the other side surface of the first plate. The second plate is elevated with respect to the first plate. A translational movement portion moves the first plate with respect to the vertical frame. The elevation portion elevates the first plate. Gripper assemblies(50) are arranged on an outer surface of the second plate in a vertical direction with a predetermined distance between them. The gripper assembly grasps an exhaust pipe of a vacuum exhaust/discharge gas injection apparatus.