发明名称 |
METHOD FOR RECOVERING NEON |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for efficiently recovering a neon gas accounting for most of all gas from an excimer-laser device using an xenon-chlorine based gas. <P>SOLUTION: The neon gas in the excimer-laser gas is recovered by the treating step containing a first step of eliminating hydrogen chloride component from the exhaust excimer-laser gas from the excimer-laser device (1) using the xenon-chlorine based excimer-laser gas, a second step of eliminating hydrogen component from the exhaust excimer-laser gas through allowing a through gas from the first step to pass through a catalyst device (8), the third step for primarily cryostatically adsorbing the through gas from the second step at a xenon boiling point, the fourth step for secondarily cryostatically adsorbing a through gas from the third step at a nitrogen boiling point. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
申请公布号 |
JP2008168169(A) |
申请公布日期 |
2008.07.24 |
申请号 |
JP20070000921 |
申请日期 |
2007.01.09 |
申请人 |
IWATANI INTERNATL CORP;IWATANI INDUSTRIAL GASES CORP |
发明人 |
MANABE TOSHIKI;YURUGI MASASHI |
分类号 |
B01D53/68;C01B23/00;F25J3/08 |
主分类号 |
B01D53/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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