发明名称 |
Vapor deposition sources and methods |
摘要 |
Vapor depositions sources, systems, and related deposition methods. Vapor deposition sources for use with materials that evaporate or sublime in a difficult to control or otherwise unstable manner are provided. The present invention is particularly applicable to deposition of organic material such as those for forming one or more layer in organic light emitting devices.
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申请公布号 |
US2008173241(A1) |
申请公布日期 |
2008.07.24 |
申请号 |
US20070002526 |
申请日期 |
2007.12.17 |
申请人 |
PRIDDY SCOTT WAYNE;BRESNAHAN RICHARD CHARLES;CONROY CHAD MICHAEL |
发明人 |
PRIDDY SCOTT WAYNE;BRESNAHAN RICHARD CHARLES;CONROY CHAD MICHAEL |
分类号 |
C23C16/455;B01D7/00 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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