| 摘要 |
PROBLEM TO BE SOLVED: To analyze a physical property of the surface layer of an extremely thin sample. SOLUTION: An electrostatic chuck type sample fixing tool 1 for attracting and fixing a sample P by an electrostatic chuck onto a sample fixing surface 1a whose surface roughness (Rmax) is 5μm or less, and a surface layer physical property analyzer body 2 for cutting the sample P fixed onto the sample fixing surface 1a with a cutting blade 2a from the surface and analyzing the physical property based on the cutting result are provided, Hereby, the surface layer of the extremely thin sample such as an extremely thin polymer film of about 15μm can be cut properly, and the physical property of the surface layer can be analyzed properly. COPYRIGHT: (C)2008,JPO&INPIT
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