METHOD FOR PRODUCING A HIGH PURITY TRISILANE PRODUCT FROM THE PYROLYSIS OF DISILANE,申请号US20070863524-传众专利搜索

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发明名称	METHOD FOR PRODUCING A HIGH PURITY TRISILANE PRODUCT FROM THE PYROLYSIS OF DISILANE
摘要	Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.
申请公布号	US2008175784(A1)	申请公布日期	2008.07.24
申请号	US20070863524	申请日期	2007.09.28
申请人	AMERICAN AIR LIQUIDE, INC.;AIR LIQUIDE ELECTRONICS U.S. LP;L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE	发明人	BOURASSEAU CYRIL;JURSICH GREGORY M.;XU MINDI;BORZIO JOHN P.;MITCHELL DONALD W.;ZHOU DERONG;MONCUR THOMAS K.
分类号	C01B33/04	主分类号	C01B33/04
代理机构		代理人
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