| 摘要 |
PROBLEM TO BE SOLVED: To regenerate the scrapped ITO sintered body with a simple process at the low cost by grinding a scrapped ITO(indium tin oxide) sintered body into granules each having a specified granule size and thereafter compacting and sintering the granules. SOLUTION: In this method, examples of scrapped sintered bodies to be regenerated are those each of which has a lowered sinter density due to generation of cleavages, cracks, or the like during sintering, or any other cause and accordingly no commercial value, or preferably, those each of which is obtained by removing deposits and bonding materials from the surface of an ITO sintered body that is peeled off from a backing plate of a used ITO target. This method comprises: grinding such a scrapped sintered body into granules each of which has a <=0.5 mm or preferably, <=0.2 mm granule size and a >=0.1 m<2> /g BET specific surface area value; thereafter, if necessary, mixing the granules with a powder consisting substantially of In, Sn and O, (such as a powdery mixture of indium oxide and tin oxide, each of which is formed by a direct oxidation method or by converting metal In or metal Sn into the corresponding hydroxide with a neutralization method and thereafter calcining the hydroxide, or powdery In-Sn double oxide); compacting the resulting mixture into a compackted body; and sintering compackted body. |
