| 摘要 |
<p>A slit coater nozzle is provided to perform micro adjustment by utilizing a worm wheel and a worm instead of a conventional bolt structure to control a width of an outlet. A slit coater nozzle includes a nozzle(10) and at least one adjusting unit(20). The nozzle formed by a pair of plates includes an outlet for spraying chemical fluids toward a substrate. The adjusting unit adjusts a width of the outlet at a side of the nozzle. The adjusting unit includes an adjusting member(30), an up/down adjusting member(40), and first and second rotation members(50,60). The adjusting member is formed at a side of the nozzle to adjust the width of the outlet. The up/down adjusting member formed in the adjusting member adjusts a width of the adjusting member to up and down directions. The first rotation member delivers rotation force to the up/down adjusting member by coupling with the up/down adjusting member. The second rotation member formed to contact with the first rotation member supplies rotation force to the first rotation member.</p> |
