Force sensor, force detection system and force detection program

摘要

A force sensor converts a force into capacitance and makes it possible to generate a plurality of outputs with different output characteristics, force detection system, and a digital force detection program for it. The force sensor 20 has a displacement unit 24 for generating a displacement when a force is applied; a single or a plurality of first sensor units ( 36, 36 A, 36 B, 36 C, and 36 D) for generating a first output C₁ from said displacement of the displacement unit; and a second sensor unit 44 , which is annexed to the first sensor unit, for generating a second output C₂ from the displacement of said displacement unit. The force detection system enhances the output accuracy by means of the first and second outputs of such a force sensor. The force detection program is used in the force detection system for executing the output process.