ILLUMINATION SYSTEM FOR AN ATOMIC FORCE MICROSCOPE AND CONTROL PROCESS THEREOF

摘要

An illumination system for an atomic force microscope and a method for controlling the same are provided to simplify an overall structure by installing a compact high density light emission device at a position adjacent to a cantilever in order to thereby easily illuminate a light source. An illumination system for an atomic force microscope includes an image information acquisition unit(10), an objective lens(20), a prism(30), a control unit(400), a signal processing unit(300), a driving unit(200), and a cantilever(50). The illumination system easily aligns a laser beam by identifying a position of the cantilever at the atomic force microscope. The illumination system further includes an illumination unit(100) positioned between a reflective mirror(40) and the cantilever so as to illuminate a light source required for the image information acquisition unit to identify a surface state of a sample.