| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device and method for a film, capable of inspecting simply and easily an optical defect in the film to be inspected formed with an optical compensation layer having a double refraction characteristic, in a production line or the like. SOLUTION: A correction film for canceling the double refraction characteristic of the optical compensation layer in the film to be inspected is provided between an illumination light source for projecting a light onto a film face of the film to be inspected and a photoreception means for measuring a transmission light, when inspecting the optical defect in the film to be inspected, by making the light get incident on the film to be inspected having the optical compensation layer having the double refraction characteristic, and by measuring the transmission light transmitted through the film to be inspected, and the correction film is arranged in an inner side with respect to the film to be inspected than a polarizer. COPYRIGHT: (C)2008,JPO&INPIT
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