| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer processing apparatus having high transfer properties and a transfer processing method. SOLUTION: The transfer processing apparatus has a master 11 with an uneven pattern 12 formed on its surface, a holder 13 which fixes the master 11, a stage 17 on which a resin 20 to be processed is mounted, and a heater which heats the holder 13 and the stage 17. In the transfer processing apparatus 10 for transferring the uneven pattern 12 to the resin 20 to be processed by pressing the master 11 to the resin 20, a resin damming mechanism 15 movable in the press direction P is provide on the surface to which the master 11 of the holder 13 is fixed. COPYRIGHT: (C)2008,JPO&INPIT
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