| 摘要 |
A method of packaging a photo mask is provided to prevent generation of growing foreign substances such as sulfur oxides or amine-based volatile organic compounds. A method of packaging a photo mask includes forming a pattern mask on a transparent mask substrate to manufacture a photo mask(100), inserting the manufactured photo mask into a mask box(200), sealing the mask box, inserting the sealed mask box into a vinyl package(300), vacuuming the vinyl package, and filling N2 gas into the vinyl package. The mask box functions to prevent mechanical impact from being applied to the photo mask to prevent damage to the photo mask.
|
