| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device for irradiation of a test piece, in particular, for inspection and structurization of it, and a focused ion beam device and an operating method of the focused ion beam device. SOLUTION: The device is provided with an ion beam column including a closed space for housing an emitter having an emitter region for ion generation, a first gas inlet adapted for introducing a first gas into the emitter region, a second gas inlet adapted for introducing a second gas different from the first gas into the emitter region, and a switching unit adapted for switching over introduction of the first gas and the introduction of the second gas. COPYRIGHT: (C)2008,JPO&INPIT
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