| 摘要 |
A method for fabricating a semiconductor device is provided, in which drift areas are deeply formed in a silicon substrate even when a drive-in process is performed at a relatively lower temperature for a relatively shorter processing time. Therefore, the defects caused by thermal bird's beaks and the horizontal diffusion of implanted impurities can be effectively suppressed. As a result, the punch-through property and the isolation property of high voltage components of the semiconductor device can be improved. Thus, the chip design size can be reduced.
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