发明名称 SYSTEMS AND METHODS FOR UTILIZING SCANNING PROBE SHAPE CHARACTERIZATION
摘要 A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.
申请公布号 WO2008079349(A2) 申请公布日期 2008.07.03
申请号 WO2007US26193 申请日期 2007.12.21
申请人 VEECO METROLOGY INC.;BAO, TIANMING;LIU, HAO-CHIH;GREGORY, DAHLEN, A.;JAIN, ROHIT 发明人 BAO, TIANMING;LIU, HAO-CHIH;GREGORY, DAHLEN, A.;JAIN, ROHIT
分类号 G01Q30/06;G01Q40/00 主分类号 G01Q30/06
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