发明名称 METHOD FOR MANUFACTURING CMOS IMAGE SENSOR OF SEMICONDUCTOR DEVICE
摘要 <p>A method for manufacturing CIS(CMOS Image Sensor) of a semiconductor device is provided to improve image quality by controlling curvature of a pixel micro lens differently according to each color. While forming a micro lens, a blue photo mask is formed by irradiating optical energy to a blue pixel region so as to decrease a refraction angle. A green photo mask is formed by irradiating lower optical energy to a green pixel region than the blue pixel region. And a red photo mask is formed by irradiating the lowest optical energy to a red pixel region so as to increase the refraction angle.</p>
申请公布号 KR20080060460(A) 申请公布日期 2008.07.02
申请号 KR20060134571 申请日期 2006.12.27
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KIM, SANG SIK
分类号 H01L27/146;H01L21/027 主分类号 H01L27/146
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