COOLING CHAMBER USING IMPLANT PROCESS,申请号KR20060108185-传众专利搜索

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发明名称	COOLING CHAMBER USING IMPLANT PROCESS
摘要
申请公布号	KR100841846(B1)	申请公布日期	2008.06.27
申请号	KR20060108185	申请日期	2006.11.03
申请人		发明人
分类号	H01L21/265;H01L21/02	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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