发明名称 |
METHOD AND APPARATUS FOR MEMS OSCILLATOR |
摘要 |
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
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申请公布号 |
US2008150647(A1) |
申请公布日期 |
2008.06.26 |
申请号 |
US20070950373 |
申请日期 |
2007.12.04 |
申请人 |
MIRADIA INC. |
发明人 |
YANG XIAO;CHEN DONGMIN;WANG YE;PAYNE JUSTIN;WANG YUXIANG;JI WOOK |
分类号 |
H01L41/09;H01L41/22;H03B5/36 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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