| 摘要 |
PROBLEM TO BE SOLVED: To set a fixed quantity of an overdrive at each measuring point in a semiconductor wafer at all times, and to realize a stable contact between a probe and a pad for inspection. SOLUTION: A probe card is used when inspecting the semiconductor wafer. The probe card concretely has a card body 101 arranging a first surface while being opposed against the surface to be inspected of the semiconductor wafer and the probes 104 and 104 fitted to the first surface and brought into contact with the pad for inspection fitted to the surface to be inspected of the semiconductor wafer. The probe card concretely has projections 105, 106, 107 and 108 formed at a center and a periphery in the first surface so as to be projected from the first surface so that the expansion and contraction of the card body 101 due to a temperature change can be detected. COPYRIGHT: (C)2008,JPO&INPIT
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