发明名称
摘要 <p>An apparatus for cooling at least two heated surfaces includes a base plate defining multiple upper and lower supply manifolds and upper and lower exhaust manifolds. The upper and lower supply (exhaust) manifolds receive (exhaust) coolant, and the upper (lower) supply and exhaust manifolds are interleaved. The apparatus further includes an upper substrate having an inner surface and an outer surface. The inner surface is coupled to the base plate and defines multiple microchannels for receiving and exhausting coolant. The outer surface is in thermal contact with one of the heated surfaces. The apparatus further includes a lower substrate having an inner surface and an outer surface. The inner surface is coupled to the base plate and defines multiple microchannels for receiving and delivering coolant. The outer surface is in thermal contact with another of the heated surfaces. The apparatus further includes a supply plenum and an exhaust plenum oriented in a plane of the base plate.</p>
申请公布号 JP2008522406(A) 申请公布日期 2008.06.26
申请号 JP20070543147 申请日期 2005.11.14
申请人 发明人
分类号 H01L23/473;H05K7/20 主分类号 H01L23/473
代理机构 代理人
主权项
地址