| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for measuring and supplying powder into a reaction container and the like by turning a container with an inner bag upside down while preventing the powder from scattering around it and its supplying method. SOLUTION: The powder supplying device 100 for supplying the powder stored in a raw material container with the inner bag to the reaction container consists of a glove box body 10, a powder introduction pipe 21 provided at an upper part of the glove box body 10, a powder introduction pipe 22 provided at a lower part of the glove box body 10, lid plates 31, 32 for opening and closing respective pipe ports 21a, 22a, lid plate vertical travel driving devices 41, 42 for moving the lid plates 31, 32 to closely contact with or separate from the respective pipe ports 21a, 22a, lid plate horizontal travel driving devices 51, 52 for moving the lid plates 31, 32 horizontally in such a state that the lid plates 31, 32 and the respective pipe ports 21a, 22a are separated and an air introduction part 25, provided at a side part of the powder introduction pipe 21, for introducing air into the device 100 from the powder introduction pipe 21. COPYRIGHT: (C)2008,JPO&INPIT
|
