发明名称 Method to selectively identify reliability risk die based on characteristics of local regions on the wafer
摘要 A method and system for selectively identifying reliability risk die based on characteristics of local regions on a wafer by computing particle sensitive yield and using the particle sensitive yield to identify reliability risk die. Specifically, a bin characteristics database which identifies hard and soft bins that are sensitive to different failure mechanisms is maintained, and the bin characteristics database is used to compute particle sensitive yield. It is determined whether the particle sensitive yield of the local region around the current die is less than a pre-set threshold, and the die is downgraded if the particle sensitive yield of the local region around the current die is less than the pre-set threshold. If the particle sensitive yield of the local region around the current die is not less than the pre-set threshold, the die is not downgraded.
申请公布号 US7390680(B2) 申请公布日期 2008.06.24
申请号 US20050031564 申请日期 2005.01.06
申请人 LSI CORPORATION 发明人 GONZALES RAMON;COTA KEVIN;REHANI MANU;ABERCROMBIE DAVID
分类号 G01R31/26;G06F11/30;G06F15/00;G06F17/18;G06F17/50;G06F19/00;G06M11/04;H01L21/66;H01L23/58;H01L29/10 主分类号 G01R31/26
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