| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of measuring the temperature and temperature distribution of a substrate that is being heat-treated. SOLUTION: A thermography 28 is provided, where thermography divides a heating plate 10 into a plurality of compartments in a plan view, arranges a separately controllable division heater for each compartment, and measures the temperature and temperature distribution of the substrate W supported on the heat plate for heat treatment. Based on the temperature and temperature distribution of the substrate W, measured by the thermography 28 and the prestored information at a position corresponding to each compartment of the heating plate 10 and a flat size, feedback control is performed on each division heater so that the average temperature in each region, corresponding to each compartment of the heat plate of the substrate, becomes equal. COPYRIGHT: (C)2008,JPO&INPIT
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