| 摘要 |
A substrate for temperature measurement has seventeen temperature measuring elements mounted thereto and each having a built-in quartz resonator. Each of the temperature measuring elements is connected to one coaxial cable covered with fluorocarbon resin having excellent heat resistance. The seventeen cables are bonded to the substrate for temperature measurement using an adhesive so that all the paths of the cables from their contacts with the temperature measuring elements to their boundary points to the outside of the substrate run on the upper surface of the substrate for temperature measurement, and that they are made to have a substantially equal length from their contacts to their boundary points. This minimizes and makes uniform thermal disturbances given to each of the temperature measuring elements from the cables, thus enabling high-precision substrate temperature measurement.
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