METHOD OF PRODUCING COMPOUND OXIDE MEMBRANE, AND HYDROGEN PERMEATION STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a compound oxide membrane by which a compound oxide membrane is formed using a high frequency ion plating process, by which a compound oxide membrane with a stable composition can be easily obtained, and to provide a hydrogen permeation structure having stable performance with a compound oxide membrane obtained by the production method as a component.

SOLUTION: The method for producing the compound oxide membrane comprises: a heating stage where an evaporation source composed of the solid powder of raw material elements for a compound oxide is heated at a vacuum degree of ≤9.9×10-4Pa while keeping the solid powder state; a melting stage where the evaporation source is further heated so as to be melted, and the evaporation source is held to be a melted state for ≥5 min at a vacuum degree of ≤9.9×10-4Pa; and a film forming stage by a high frequency ion plating process started after the completion of the melting stage. Also disclosed is a hydrogen permeation structure having an oxide proton conductive membrane formed by the production method.

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