| 摘要 |
Disclosed is an example method to reduce waveguide scattering loss. The method includes forming a waveguide having a sidewall, the waveguide including a group III-V compound semiconductor material, and growing a native oxide on the waveguide to form an index of refraction contrast at the sidewall, the native oxide grown in a controlled Oxygen-enriched water vapor environment to reduce a roughness of the sidewall.
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