| 摘要 |
PROBLEM TO BE SOLVED: To built a working line for splitting a substrate body having vertical and horizontal parting lines into strips having subdivided substrates in a row, i.e., subdivided substrates, and a working line for splitting margin plates of the substrate body. SOLUTION: The system is constituted so that a series of working processes are provided on a working line 9 rectangular in a plan view in which a sheet 28 can be circulated. First-fourth delivery processes are provided at the corner of the working line, and a substrate body transfer process for placing the substrate body on a sheet is provided in the middle of a strip forming process for receiving the sheet from a sheet recovering process in the first delivery process. The strip forming/subdivided plate forming process transfers the substrate body placed on the sheet, maintaining the rectangular shape of the substrate body before splitting while splitting a target on the halfway; the second and third delivery processes include steps for pushing the transferred sheet into a direction perpendicular to the transfer direction and transfers the sheet; a subdivided substrate recovering process places subdivided substrates on the sheet and discharges and recovers the subdivided substrates while leaving the sheet; the fourth delivery process transfers the residual sheet to the sheet recovering process; and the sheet recovering process transfers the sheet to the first delivery process. COPYRIGHT: (C)2008,JPO&INPIT
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