| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure gas bearing spindle capable of restraining the occurrence of damage by discharge, by restraining accumulation of electric charge in a bearing sleeve, while sufficiently securing the function of sealing an annular space by an elastic support part and damping whirling vibration of a rotary shaft. SOLUTION: This static pressure gas bearing spindle 1 has the rotary shaft 10, the bearing sleeve 20 arranged so as to surround an outer peripheral surface 10A of the rotary shaft 10, a housing 30 surrounding the bearing sleeve 20 and supporting the bearing sleeve 20, and the elastic support part 40 arranged between the bearing sleeve 20 and the housing 30. The elastic support part 40 has electric conductivity by including an O ring 41 and conductive grease 71 having electric conductivity applied to a surface of the O ring 41. COPYRIGHT: (C)2008,JPO&INPIT
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