APPARATUS AND METHOD FOR INSPECTING SEMICONDUCTOR DEVICE
摘要
<p>An apparatus and method for inspecting a semiconductor device capable of inspecting a status of a semiconductor device by a captured image of the semiconductor device. The apparatus for inspecting a semiconductor device, comprises: a camera module for capturing an image of semi-conductor device to be inspected; and a moving module having a plurality of sub-moving modules for moving the camera module with respect to the semiconductor device according to different moving scales.</p>
