| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a stamper for optical information medium having a fine irregular shape with a satisfactory yield. SOLUTION: In the method, a stamper master plate 50 for optical information recording medium containing Si and having the irregular shape for optical information recording medium formed thereon is used to manufacture the stamper 60 for optical information recording medium. The method includes: a thin film formation step of forming a metal thin film 61 as an electric conductive layer on the surface of the stamper master plate 50 with the irregular shape formed thereon; a plating step of forming a metal plate 63 including the metal thin film 61 by performing electroplating on the metal thin film 61; and a detachment step of detaching the metal plate 63 from the stamper master plate 50. A waiting step of at least 2.0 hours is included between the thin film formation step and the plating step, wherein the waiting time in an atmosphere containing oxygen in the waiting step is in a range of 0 to 168 hours. COPYRIGHT: (C)2008,JPO&INPIT
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