发明名称 TARGET FOR LASER ABRASION AND PROCESS FOR PRODUCING THE SAME
摘要 An RE oxide superconducting sintered material that can be used as a target applicable to the laser abrasion technique without the need of bonding to backing plate; and a process for producing the same. Various powders or solutions are provided, and weighing and mixing are performed so as to, when the composition formula of RE oxide superconductor is expressed as REaBabCucOx, satisfy a+b+c=6, 0.95<a<1.05 and 1.505<=c/b<1.6. Thereafter, calcination, pulverization, firing, pulverization and molding are performed, thereby obtaining an RE oxide superconducting sintered material. The RE oxide superconducting sintered material is used as a target for laser abrasion.
申请公布号 KR20080053284(A) 申请公布日期 2008.06.12
申请号 KR20087005145 申请日期 2008.02.29
申请人 DOWA ELECTRONICS MATERIALS CO., LTD. 发明人 KOJIMA MASAHIRO
分类号 C23C14/24;C01G1/00;C04B35/45 主分类号 C23C14/24
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