| 摘要 |
PROBLEM TO BE SOLVED: To provide high-precision photoelectric encoder with its production cost lowered and manufacturing method of scale for the photoelectric encoder. SOLUTION: This photoelectric encoder comprises a scale 2 with grids formed at specified pitch along scaling axis, a light source 1 which illuminates the scale 2 from the tip so as to form lighting spot on the grids, and an optical receiver 3 for receiving reflected light from the scale 2. In the encoder, at least the optical receiver 3 and the light source 1 are disposed to be relatively-movable in the measuring axis direction to the scale 2, light from the light source 1 is irradiated on the scale 2, and its reflected light is received by the optical receiver 3. The scale 2 is equipped with plural reflective layers 21a and 21b in which depth from surface of the scale 2 is different each other to reflect light of wave length varied depending on the above depth, while the light source 1 irradiates a plurality of lights with different wave length, respectively. COPYRIGHT: (C)2008,JPO&INPIT |
