发明名称 |
ETCHING METHOD, PATTERN FORMING PROCESS, THIN-FILM TRANSISTOR FABRICATION PROCESS, AND ETCHING SOLUTION |
摘要 |
An etching method is provided in which selective etching can be carried out for an amorphous oxide semiconductor film including at least one of gallium and zinc, and indium. In the etching method, the selective etching is performed using an alkaline etching solution. The alkaline etching solution contains especially ammonia in a specific concentration range. |
申请公布号 |
WO2008069057(A2) |
申请公布日期 |
2008.06.12 |
申请号 |
WO2007JP72880 |
申请日期 |
2007.11.20 |
申请人 |
CANON KABUSHIKI KAISHA;CHANG, CHIENLIU |
发明人 |
CHANG, CHIENLIU |
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