PLASMA PROCESSING APPARATUS,申请号US20070947610-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS
摘要
申请公布号	US2008135177(A1)	申请公布日期	2008.06.12
申请号	US20070947610	申请日期	2007.11.29
申请人	TES CO., LTD.	发明人	KIM SUNG RYUL
分类号	H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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