POSITIONING DEVICE, EXPOSURE SYSTEM, METHOD FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To achieve a reduction in movement stroke of a mass while driving the mass to reduce reactive force that accompanies a movement of a stage.

SOLUTION: A positioning device has an inertia imparting mechanism for driving a mass. The inertia imparting mechanism includes: a reactive force compensation control system for generating and outputting a signal for reducing reactive force that accompanies a movement of a stage; a position compensation control system for generating and outputting a signal for reducing the relative distance between a plurality of masses accumulated; and selecting means for selecting and outputting a part of the output of the position compensation control system. The driving of a mass is controlled in accordance with the output of the selecting means.

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