发明名称 |
Method and apparatus for fabricating quantum dot functional structure, quantum dot functional structure, and optically functioning device |
摘要 |
Fabrication of a quantum dot functional structure having ultra-fine particles homogeneously distributed in a transparent medium includes depositing such particles having a single particle diameter and uniform structure onto a substrate with the transparent medium. An apparatus for fabricating a quantum dot functional structure comprises: a generating chamber for generating high-purity ultra-fine particles by exciting a semiconductor target with pulsed laser light in low-pressure rare gas, and then allowing the semiconductor target to be detached or ejected by ablation and condensed and grown in the gas; a particle classifying chamber for classifying the ultra-fine particles; a depositing chamber for depositing the high-purity semiconductor ultra-fine particles and the transparent medium by exciting a transparent medium target with excimer laser light simultaneously or alternately when the particles are collected onto the substrate, and by collecting the substance generated through ablation onto the substrate; and a carrier gas exhaust system.
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申请公布号 |
US7384666(B2) |
申请公布日期 |
2008.06.10 |
申请号 |
US20030657248 |
申请日期 |
2003.09.09 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;JAPAN AS REPRESENTED BY DIRECTOR GENERAL OF NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, MINISTRY OF ECONOMY, TRADE AND INDUSTRY |
发明人 |
SUZUKI NOBUYASU;MAKINO TOSHIHARU;YAMADA YUKA;YOSHIDA TAKEHITO;SETO TAKAFUMI;AYA NOBUHIRO |
分类号 |
B05D5/06;B22F9/12;C23C14/06;C23C14/28;H01L33/00 |
主分类号 |
B05D5/06 |
代理机构 |
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地址 |
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