| 发明名称 |
Method and scanning electron microscope for measuring width of material on sample |
| 摘要 |
A width-measurement method of reducing or eliminating an error in measurement of a width of an object on a sample resulting from the dimension of the beam diameter, wherein a width-measured value of the object to be width-measured which has been obtained on the basis of a secondary signal obtained from secondary particles emitted from the sample having thereon the object to be width-measured is corrected with a value with respect to a dimension value of a beam diameter.
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| 申请公布号 |
US7385196(B2) |
申请公布日期 |
2008.06.10 |
| 申请号 |
US20040911480 |
申请日期 |
2004.08.05 |
| 申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
SHIMOMA GOROKU;OTAKA TADASHI;SATO MITSUGU;TODOKORO HIDEO;WATANABE SHUNICHI;TAKAHASHI TADANORI;KAWAWA MASAHIRO;GUNJI MASANORI;NISHINO TERUMICHI |
| 分类号 |
G01B15/00;H01J37/28;H01J37/22;H01L21/66 |
主分类号 |
G01B15/00 |
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