| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter removal apparatus which prevents the reattachment of a foreign matter removed from an annular object to the annular object, and to provide an foreign matter removal apparatus which enhances the suction capability when the foreign matter removed from an annular object is sucked. SOLUTION: The foreign matter removal apparatus 1 is provided with a central nozzle 41 to jet air slantly outward against the radial direction at the inside of a work piece W, a peripheral nozzle 42 to jet air slantly inward against the radial direction at the outside of the work piece W, an enclosing case 30 that covers the work piece W and can be evacuated, vanes 35, 36 that are fitted to the inner wall of the enclosing case 30 in order to change the direction of the air flow formed on the enclosing case 30 in the downward direction by air jetted from the central nozzle 41 and the peripheral nozzle 42 and a suction part 12 to suck the foreign matter within the enclosing case 30 that is equipped with a conical cone 25 to limit the suction port 26 to the outer peripheral part. COPYRIGHT: (C)2008,JPO&INPIT
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