发明名称 METHOD OF METALLIZING A SOLAR CELL SUBSTRATE
摘要 Embodiments of the invention contemplate the formation of a low cost solar cell using a novel high speed electroplating method and apparatus to form a metal contact structure having selectively formed metal lines using an electrochemical plating process. The apparatus and methods described herein remove the need to perform one or more high temperature screen printing processes to form conductive features on the surface of a solar cell substrate. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. It is thus desirable to form a solar cell device that has a low resistance connection that is reliable and cost effective. Therefore, one or more embodiments of the invention described herein are adapted to form a low cost and reliable interconnecting layer using an electrochemical plating process containing a common metal, such as copper.
申请公布号 US2008128019(A1) 申请公布日期 2008.06.05
申请号 US20060566201 申请日期 2006.12.01
申请人 APPLIED MATERIALS, INC. 发明人 LOPATIN SERGEY;KOVARSKY NICOLAY Y.;EAGLESHAM DAVID;DUKOVIC JOHN O.;GAY CHARLES
分类号 H01L31/00;C25D5/10;C25D5/12 主分类号 H01L31/00
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