| 摘要 |
PROBLEM TO BE SOLVED: To delay reductions with the passage of time in the degree of vacuum of an electronic cooled-type semiconductor X-ray detector. SOLUTION: An adsorbent (9) is placed in a vacuum vessel (7) of the electronic cooled-type semiconductor X-ray detector (100) to adsorb the gases discharged inside or entering from the outside. As a result, since gases are adsorbed by the adsorbent (9), even if gases have been discharged inside the vacuum vessel (7) or entered from the outside, it is possible to delay reductions, with passage of time in the degree of vacuum of the vacuum vessel (7). Hence detection performance can be maintained satisfactorily over a long time. COPYRIGHT: (C)2008,JPO&INPIT
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