| 摘要 |
PROBLEM TO BE SOLVED: To provide a new transfer device and transfer process which realize nanoimprinting on a larger area with higher throughput. SOLUTION: Transfer plate 33 having predefined fine patterns is pressed against a substrate film F1 previously coated with a resin. The fine patterns are transferred to the resin. The transfer plate 33 is processed into a cylindrical form and removably attached to a rotary shaft 32. The substrate film F1 is continuously fed and brought into contact with the surface of the transfer plate 33 on the rotary shaft 32 to continuously transfer the predetermined fine patterns on the resin. Since the predetermined fine patterns are continuously transferred on the substrate film F1, nanoimprinting on a larger area with higher throughput is easily attained. COPYRIGHT: (C)2008,JPO&INPIT |
