发明名称 Heteroatomic single-crystal layers
摘要 A method for forming, by epitaxy, a heteroatomic single-crystal semiconductor layer on a single-crystal semiconductor wafer, the crystal lattices of the layer and of the wafer being different, including forming, before the epitaxy, in the wafer surface, at least one ring of discontinuities around a useful region.
申请公布号 US7381267(B2) 申请公布日期 2008.06.03
申请号 US20040816214 申请日期 2004.04.01
申请人 STMICROELECTRONICS S.A. 发明人 BENSAHEL DANIEL;KERMARREC OLIVIER;MORAND YVES;CAMPIDELLI YVES;COSNIER VINCENT
分类号 C30B23/00;C30B25/18;H01L21/00;H01L21/20 主分类号 C30B23/00
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