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发明名称
GASVERTEILUNGSVORRICHTUNG FÜR DIE HALBLEITERBEARBEITUNG
摘要
申请公布号
DE60036291(T2)
申请公布日期
2008.05.29
申请号
DE20006036291T
申请日期
2000.06.12
申请人
LAM RESEARCH CORP.
发明人
DHINDSA, RAJINDER;HAO, FANGLI;LENZ, ERIC
分类号
H01J37/32;H05H1/46;C23C16/44;C23C16/455;H01L21/302
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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