SYSTEM AND METHOD FOR CONTROL OF ELECTROMAGNETIC RADIATION IN PECVD DISCHARGE PROCESSES

摘要

PROBLEM TO BE SOLVED: To provide a system for and a method of coating a substrate with a film. SOLUTION: One embodiment includes a process that provides a substrate on which to deposit a film; generates a plasma to produce radicals from a support gas; disassociates a precursor gas using the radicals; deposits a material from the disassociated precursor gas on the substrate; and controls the amount of electromagnetic radiation to which the deposited material is exposed. COPYRIGHT: (C)2008,JPO&INPIT