| 发明名称 |
NICHTSTÖCHIOMETRISCHES NIOX-KERAMIK-TARGET |
| 摘要 |
The subject of the invention is an essentially ceramic target for a sputtering device, especially for magnetically enhanced sputtering, said target comprising predominantly nickel oxide, the nickel oxide NiO<SUB>x </SUB>being oxygen-deficient with respect to the stoichiometric composition. |
| 申请公布号 |
DE60320375(D1) |
申请公布日期 |
2008.05.29 |
| 申请号 |
DE2003620375 |
申请日期 |
2003.02.04 |
| 申请人 |
SAINT-GOBAIN GLASS FRANCE |
发明人 |
FANTON, XAVIER;GIRON, JEAN-CHRISTOPHE |
| 分类号 |
C23C14/34;C04B35/00;C23C14/08;G02F1/01;G02F1/15;H01B13/00 |
主分类号 |
C23C14/34 |
| 代理机构 |
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